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n-maxx-SERIES

Systems for Large Substrates
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Engineered for performance and scalability, our n.maxx series supports substrates up to 1.300 x 1.300 mm (51 x 51 inch), offering a full spectrum of processing systems —from semiautomatic platforms for R&D to fully automated combined cluster systems for high-throughput production.

n-maxx C

Spin coating with CCP

n-maxx H

Hotplate, coolplate

n-maxx W

Wet cleaning, etching

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