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Microfluidics
Microfluidics is a rapidly growing field that involves manipulating small volumes of fluids in channels with micrometer and nanometer dimensions, respectively. These technologies find extensive applications in chemical and biological research, medical diagnostics, and industrial settings and enable the development of lab-on-a-chip devices, offering miniaturized platforms for chemical and biological reactions.
MEMS based etch and deposition processes for control of low volumes fluids.
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Deep Silicon Etch and Cryogenic Etch
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Glass and polymer etch
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Plasma bonding and de-scum
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Plasma surface modification
3D imaging of reflective (e.g. silicon) and transparent (e.g. glass, PDMS) substrates from any angle.
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