Lithography

Lithography is a process used to pattern parts of a thin film or the bulk of a substrate. It is crucial for the fabrication of nanoscale structures and devices. There are several types of lithography techniques, each suited for different applications and resolutions. Nano Vacuum provides complex laser and LED-based maskless lithography systems. With multiple tools installed throughout Australia & New Zealand we are confident in providing you a solution for your lithography requirements. Below are some of the equipment and tools.

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• Direct write Lithography

• Thermal Scanning Probe Lithography

• 3D Microprinting

• Photoresists & Polymers

• Spin/ Spray Coater

• Inkjet Printing​

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