Fabrication

Fabrication tools are used to deposit, heat, etch, modify, reshape or clean materials. Nano Vacuum offer tools and accessories for R&D, pilot and production systems. An overview of the equipment and tools we supply for fabrication include:

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• Physical Vapour Deposition

• Atomic Layer Deposition

• Atomic Layer Etch

• Dry Plasma Etching

• Chemical Vapour Deposition

• Ion Beam Deposition

• Vacuum Heating / High Temperature Ovens

• Plasma Cleaning & Ashing

• Parylene Coating Systems