vanguard SONATA1000

High-precision additive nanofabrication of single-mode waveguides and freeform micro-optics

Industry-grade opto-mechanical design

Suitable for processing of 12’’ wafers

Vibration-isolated mainframe and housing

Optical dispersion management system

Suitable for use with silicon photonics, silicon nitride, indium phosphide, thin film lithium niobate and other material platforms

Low loss coupling to surface and edge emitting photonic devices

Compatible with single mode fibers, multi-core fibers and fiber arrays

Scalable, cost-efficient production

Industry-grade 780 nm laser with > 140 mW output power and 100 fs pulse

Compatible with high-NA lithography objectives (NA 0.85 to 1.4)

Write field of 400 µm × 340 µm for NA = 1.4

Positioning stage with > 250 mm travel range (X,Y)

High-speed, high-precision z-drive with a resolution of 20 nm

Voxel positioning resolution better than 50 nm

Marker detection accuracy < 100 nm

3D imaging capabilities