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vanguard REPRISE1000
Fully automated post processing tool for development and encapsulation
Industry-grade mechanical design with UV safety window
Suitable for processing of 12’’ wafers.
High-speed, high-precision XYZ-gantry system
UV flood light unit and individual UV spotlight unit
Nitrogen inlets for curing and drying
Pressure regulated dispensing systems for material deposition and solvent cleaning
External solvent and waste handling unit
Includes separate oven
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